Powerful wrist torque supports transfer of large glass substrates up to the 9th generation. They can be used for reverse operations and assembly that require a variety of environments.
Payload 133kg (SH133C) / 166kg (SH166C) / 200kg (SH200C)
Weight 1300kg (SH133C & SH166C / 1345kg (SH200C)
Reach 3000mm
Applications Clean room handling
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